CEA/Iramis achieves successful HAXPES beamtime at Spring-8 Synchrotron in Japan, advancing research on oxygen vacancy profiles in HZO capacitors

Gunjan (CEA/Iramis), Ibrahima and Seo in front of the wide angle HAXPES analyzer.

Successful HAXPES beamtime for CEA/Iramis partner on the BL09XU beamline of the Spring-8 synchrotron in Japan. Many thanks to Akira Yasui, Seo Okkyun, Jiagi Tang and Ibrahima Gueye at Spring-8 for their help and support! Hopefully we have some nice results on the oxygen vacancy depth profiles in 6 nm HZO capacitors made in CEA/LETI and cycled at different voltages.

Work supported by the MicroElec project of the PEPR Diadem and by the Horizon Europe Ferro4EdgeAI.